| Zugriffsnummer | 24964 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Investigations on model-based uncertainties for the reconstruction of 2D periodic surface profiles in scatterometry |
| Autor(in); Institution |
Gross, Hermann; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Henn, Mark-Alexander; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Rathsfeld, Andreas; Weierstrass Institute for Applied Analysis and Stochastics, Berlin, GERMANY
Scholze, Frank; 7.2, Radiometrie mit Synchrotronstrahlung, PTB-Berlin
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Bär, Markus; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | EOS Topical Meeting on Diffractive Optics 2010:(2010), 2 S. |
| Availability | [CD-ROM] ; file name: Koli Gross Hermann 2483.pdf |
| ISBN | 978-3-00-024193-2 |
| Verlag | [Hannover]: European Optical Society (EOS) |
| Konferenzangaben | 7th EOS Topical Meeting on Diffractive Optics 2010, Koli, 14-18, February, 2010, Finland |
| Freie Schlagworte | Scatterometry ; Diffractive Optics ; Modelling |
| Zusammenfassung | We report on modeling and uncertainty estimates for the evaluation of measurements in scatterometry, i.e., the determination of periodic surface structures from light diffraction patterns. |
Zitierung
Gross, H., Henn, M.-A., Rathsfeld, A., Scholze, F., Bodermann, B., & Bär, M. (2010). Investigations on model-based uncertainties for the reconstruction of 2D periodic surface profiles in scatterometry. 7th EOS Topical Meeting on Diffractive Optics 2010, Koli, 14-18, February, 2010, Finland.