| Zugriffsnummer | 24934 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | On the stability of capacitance diaphragm gauges with ceramic membranes |
| Autor(in); Institution |
Jousten, Karl; 7.5, Kryo- und Vakuumphysik, PTB-Berlin
Naef, Simon; INFICON AG, Balzer, LIECHTENSTEIN
|
| Quelle/Jahr | Journal of Vacuum Science and Technology A: 29 (2011), 1, 011011-1 - 011011-7 |
| ISSN | 0734-2101 |
| DOI | |
| Verlag | New York, NY: AVS (AIP) |
| Freie Schlagworte | Capacitance diaphragm gauge ; stability ; long-term stability ; ceramic ; calibration |
| Zusammenfassung | Capacitance diaphragm gauges with ceramic membranes or diaphragms have been on the market for about 15 years. The long-term stability of these devices with full scales from 13 Pa to 133 kPa has been tested in the past decade by the calibration of gauges used by the manufacturer as reference gauges in the production line. These reference gauges were yearly calibrated on a primary standard. It was found that the reproducibility of these devices depends on their full scale. For 13 Pa the yearly reproducibility near full scale varied between 0.02% and 0.05%, for full scales of 133 Pa and higher between 0.005% and 0.03% of full scale. The reproducibility of the ceramic capacitance diaphragm gauges for full scales of 133 Pa and 1.3 kPa was significantly lower than the uncertainty of a primary standard applying the static expansion method. |
