| Zugriffsnummer | 24932 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane |
| Autor(in); Institution |
Baake, Olaf; Department of Materials Science, Technische Universität Darmstadt, Darmstadt, GERMANY
Hoffmann, Peter S.; Department of Materials Science, Technische Universität Darmstadt, Darmstadt, GERMANY
Kosinova, Marina L.; Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, RUSSIA
Klein, Andreas; Department of Materials Science, Technische Universität Darmstadt, Darmstadt, GERMANY
Pollakowski, Beatrix; 7.1, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Beckhoff, Burkhard; 7.1, Röntgenmesstechnik mit Synchrotronstrahlung, PTB-Berlin
Fainer, Nadeshda I.; Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, RUSSIA
Trunova, Valentina A.; Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, RUSSIA
Ensinger, Wolfgang; Department of Materials Science, Technische Universität Darmstadt, Darmstadt, GERMANY
|
| Quelle/Jahr | Analytical and Bioanalytical Chemistry:(2010), 8 S. |
| Availability | [online first] |
| ISSN | 1618-2642 (PRINT) ; 1618-2650 (ONLINE) |
| DOI | |
| Verlag | Berlin ; Heidelberg [u.a.]: Springer |
| Freie Schlagworte | LPCVD ; Boron carbonitride films ; XPS ; TXRF-NEXAFS |
| Zusammenfassung | Triethylamine borane (TEAB) and He, N2 or NH3 were applied as additional reaction gases in the production of BCxNy layers by low-pressure chemical vapor deposition (LPCVD). These layers were deposited on Si(100) wafers and characterized chemically by X-ray photoelectron spectroscopy (XPS) and synchrotron radiation-based total-reflection X-ray fluorescence analysis combined with near-edge X-ray absorption fine-structure spectroscopy (TXRF-NEXAFS). The composition of the material produced without NH3 was found to be dominated by B–C bonds with the stoichiometric formula B2C3N. B– N bonds with the formula B2CN3 were preferred when NH3 was added. A first attempt was made to compare the results obtained by applying trimethylamine borane and TEAB as single-source precursors. |
Zitierung
Baake, O., Hoffmann, P. S., Kosinova, M. L., Klein, A., Pollakowski, B., Beckhoff, B., Fainer, N. I., Trunova, V. A., & Ensinger, W. (2010). Analytical characterization of BCxNy films generated by LPCVD with triethylamine borane. Analytical and Bioanalytical Chemistry, 8 S. https://doi.org/10.1007/s00216-010-3965-4