| Zugriffsnummer | 24917 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | A micro-SPM head array for large-scale topography measurement |
| Autor(in); Institution |
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Li, Zhi; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Herrmann, Konrad; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Optical micro- and nanometrology III:(2010), 77181L-1 - 77181L-9 |
| Schriftenreihe | Proceedings of SPIE: 7718 |
| Herausgeber(in) |
Gorecki, Christophe
|
| ISBN | 978-0-8194-8191-7 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Conference on Optical Micro- and Nanometrology III, Brussels, 13-16, April, 2010, Belgium |
| Freie Schlagworte | Scanning probe microscope ; Atomic force microscope ; parallel AFM ; micro-electronical system ; electrostatic comb-drive ; micro-SPM head array ; large-scale topography measurement ; SPM ; AFM ; MEMS |
| Zusammenfassung | Rapid advances in nano-positioning/motion technology have offered metrologists in the field of precision engineering larger and larger potential measurement range. A concept of micro-SPM head array is proposed in this paper to enhance the performance of the currently available nano-measuring machines and effectively reduce the measurement time for large specimen. The proposed micro-SPM head array consists of 1 × N ( N = 7 in our case) micro-SPM heads/units, which are realized in one chip by MEMS technique. The kern of each SPM head is an electrostatic comb-drive actuator, whose main shaft protrudes out of the MEMS chip to sense the surface topography of a specimen under test. To further improve the lateral resolution of the micro-SPM head, an AFM tip can then be mounted onto the end of the actuator's main shaft. To ensure the traceability of the measurement results from micro-SPM head, a fiber-based interferometer array is considered to be integrated within the micro-SPM head array so as to in-situ calibrate the in-plane displacement sensing system of the micro-SPM head. Design and simulation of the mico-SPM head array together with the corresponding micro-interferometer will be detailed in this manuscript. |
