| Zugriffsnummer | 24915 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Comparability and uncertainty of shape measurements with white-light interferometers |
| Autor(in); Institution |
Boedecker, S.; Polytec GmbH, Research and Development, Waldbronn, GERMANY
Bauer, W.; Polytec GmbH, Product Management, Waldbronn, GERMANY
Krüger-Sehm, Rolf; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Lehmann, P. H.; University of Kassel, FB 16, Metrology, Kassel, GERMANY
Rembe, C.; Polytec GmbH, Research and Development, Waldbronn, GERMANY
|
| Quelle/Jahr | Optical micro- and nanometrology III:(2010), 77180J-1 - 77180J-12 |
| Schriftenreihe | Proceedings of SPIE: 7718 |
| Herausgeber(in) |
Gorecki, Christophe
|
| ISBN | 978-0-8194-8191-7 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Conference on Optical Micro- and Nanometrology III, Brussels, 13-16, April, 2010, Belgium |
| Freie Schlagworte | white-light interferometry ; shape measurements ; uncertainty budget ; shape standards ; standardization |
| Zusammenfassung | We discuss how the results obtained from a white-light interferometer can be compared to tactile measurements. The core idea to achieve comparability is to determine a short cut-off wavelength up to which the spatial frequency components of the surface topography are measured with less than 3 dB attenuation. We demonstrate for different interferometers that the data has to be filtered to achieve a linear transfer characteristic which allows to define the short cut-off wavelength. In addition, we demonstrate investigations of the error sources in shape measurements that we have identified. Results of our work are influencing a VDI/VDE calibration guideline for shape measurements which is currently under development. We show in this paper how the procedure developed for the guideline can be employed to real measurement devices. Uncertainty contributions to the error budget are also discussed and measurements on shape standards are presented. |
Zitierung
Boedecker, S., Bauer, W., Krüger-Sehm, R., Lehmann, P. H., & Rembe, C. (2010). Comparability and uncertainty of shape measurements with white-light interferometers. Conference on Optical Micro- and Nanometrology III, Brussels, 13-16, April, 2010, Belgium. https://doi.org/10.1117/12.853901