| Zugriffsnummer | 24573 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Precision size and form measurements with a micro-CMM F25 |
| Autor(in); Institution |
Neugebauer, Michael; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Advances in coordinate metrology:(2010), 43 - 49 |
| Herausgeber(in) |
Sladek, Jerzy
|
| ISBN | 978-83-622-9256-1 |
| Verlag | Bielsko-Biala: Wydawn. ATH |
| Konferenzangaben | 9th International Science Conference Coordinate Measuring Technique, Bielsko-Biala, 14-16, April, 2010, Poland |
| Zusammenfassung | The first results of the metrological characterization of a μCMM are presented. The performance of the μCMM for distance measurements and for form measurements was tested using a specially designed measurement standard of PTB. The results agree with the reference values within 100 nm or better, particularly for form measurements. |
