| Zugriffsnummer | 24249 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Accuracy of step height determination by Atomic Force Microscopy - results of an inter-laboratory comparison |
| Autor(in); Institution |
Senoner, M.; Bundesanstalt für Materialforschung und -prüfung (BAM), Berlin, GERMANY
Koenders, Ludger; 5.12, Mikro- und Nanotopographie, PTB-Braunschweig
Unger, W.; Bundesanstalt für Materialforschung und -prüfung (BAM), Berlin, GERMANY
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 3rd International Conference [and 4th General Meeting of the] European Society for Precision Engineering and Nanotechnology. Vol. 2:(2002), 773 - 776 |
| Herausgeber(in) |
Delbressine, F. L. M.
|
| ISBN | 90-386-2883-8 |
| Verlag | Eindhoven: Universiteitsdr. TU Eindhoven |
| Konferenzangaben | 3rd euspen International Conference, Eindhoven, 26-30, May, 2002, The Netherlands |
| Zusammenfassung | An inter-laboratory comparison of step height determinations with Atomic Force Microscopy (AFM) was carried out involving 40 participants. Three standards with nominal step heights of 8 nm, 80 nm and 240 nm, respectively, were used as test samples. The trueness and precision of step heights determination by the participating laboratories vary in a wide range. For step heights of 80 nm and higher the systematic deviations are predominantly caused by the calibration of the instruments. At smaller step heights the type of instrument used and the mode of contact between probe and surface are the dominating influences on the accuracy of measurements. |
