| Zugriffsnummer | 24176 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Concept, design and capability analysis of the new Deflectometric Flatness Reference at PTB |
| Autor(in); Institution |
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Ehret, Gerd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Stavridis, Manuel; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Nuclear Instruments and Methods in Physics Research A: 616 (2010), 2-3, 134 - 139 |
| ISSN | 0168-9002 (PRINT) |
| DOI | |
| Verlag | Elsevier |
| Freie Schlagworte | Deflectometry ; Flatness measurement ; Nanometrology ; Simulation ; ESAD |
| Zusammenfassung | At PTB, a new setup for the highly accurate topography measurement of nearly flat optical surfaces is now under construction. The so-called Deflectometric Flatness Reference (DFR) is designed to measure in the direct deflectometric mode by applying an autocollimator and a scanning pentaprism, and in the difference deflectometric mode corresponding to the Extended Shear Angle Difference (ESAD) principle invented by PTB. With the new DFR instrument, horizontally as well as vertically orientated specimens with dimensions of up to 1 m and a mass of up to 120 kg will be measurable. The design of the new instrument is supported by employing a comprehensive simulation environment developed for dimensional measuring machines. The mechanical and optical concept is illustrated together with the current design of the DFR setup. Results from the simulations are presented to derive requirements for tolerated mechanical stage deviations and alignment accuracies |
Zitierung
Schulz, M., Ehret, G., Stavridis, M., & Elster, C. (2010). Concept, design and capability analysis of the new Deflectometric Flatness Reference at PTB. Nuclear Instruments and Methods in Physics Research A, 616(2-3), 134–139. https://doi.org/10.1016/j.nima.2009.10.108