| Zugriffsnummer | 23992 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Model-based correction of image distortion in scanning electron microscopy |
| Autor(in); Institution |
Gnieser, D.; TU Braunschweig, Institut für Produktionsmesstechnik, Braunschweig, GERMANY
Frase, Carl Georg; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bosse, Harald; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Tutsch, R.; TU Braunschweig, Institut für Produktionsmesstechnik, Braunschweig, GERMANY
|
| Quelle/Jahr | The 9th International Symposium on Measurement Technology and Intelligent Instruments: 1 (2009), 1-147 - 1-151 |
| Availability | [CD-ROM] ; file name: Volume 1\\2_18.pdf |
| Verlag | Saint-Petersburg: D.S. Rozhdestvensky Optical Society |
| Konferenzangaben | ISMTII 2009, Saint-Petersburg, 29, June - 02, July, 2009, Russia |
| Freie Schlagworte | Monte Carlo simulation ; SEM ; micrometrology ; nanometrology |
| Zusammenfassung | A new Monte-Carlo program for simulation image formation in scanning electron microscopy for real three-dimensional use is presented; factors of image distortions are realized in the program, in respect of future photogrammetric evaluation. A first attempt for generating a 3D-analysis of simulated images is shown. |
