| Zugriffsnummer | 23989 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | The PTB nanometer comparator for metrology on length graduations and incremental length encoder systems |
| Autor(in); Institution |
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Vertu, Stanislav; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Wiegmann, Axel; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Stavridis, Manuel; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Bosse, Harald; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
|
| Quelle/Jahr | The 9th International Symposium on Measurement Technology and Intelligent Instruments: 2 (2009), 2-097 - 2-101 |
| Availability | [CD-ROM] ; file name: Volume 2\\4_20.pdf |
| Verlag | Saint-Petersburg: D.S. Rozhdestvensky Optical Society |
| Konferenzangaben | ISMTII 2009, Saint-Petersburg, 29, June - 02, July, 2009, Russia |
| Freie Schlagworte | length metrology ; length encoder ; vacuum interferometry ; double patterning lithography |
| Zusammenfassung | The Nanometer Comparator is a high precision one-dimensional length measurement machine for investigations and calibrations of line scales, linear encoders, length gauges, photomasks and laser interferometers up to 610 mm using an interferometer in vacuum, which is currently enhanced for additional straightness measurement capability. In this paper we will give an overview of the design, the measurement results and further development steps of the PTB Nanometer Comparator. |
Zitierung
Flügge, J., Weichert, C., Vertu, S., Wiegmann, A., Stavridis, M., Elster, C., Schulz, M., & Bosse, H. (2009). The PTB nanometer comparator for metrology on length graduations and incremental length encoder systems. ISMTII 2009, Saint-Petersburg, 29, June - 02, July, 2009, Russia.