| Zugriffsnummer | 23976 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Aspects of design and the characterization of a high resolution heterodyne displacement interferometer |
| Autor(in); Institution |
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bosse, Harald; 5, Fertigungsmesstechnik, PTB-Braunschweig
Tutsch, R.; TU Braunschweig, Braunschweig, GERMANY
|
| Quelle/Jahr | Fringe 2009 : the 6th International Workshop on Advanced Optical Metrology:(2009), 263 - 268 |
| Herausgeber(in) |
Osten, Wolfgang
|
| ISBN | 978-3-642-03050-5 |
| DOI | |
| Verlag | Berlin [u.a.]: Springer |
| Konferenzangaben | Fringe 2009, Nürtingen, 14-16, September 2009, Deutschland |
| Zusammenfassung | Due to current evolutions in positioning technology the uncertainty of the length measurement has to decrease continuously. Nowadays the PTB is developing measurement capabilities, which intend to reach uncertainties in sub-nanometer range. Interferometeric measurement systems are in some cases the only choice due to their direct traceability to the definition of the length unit. As part of a multinational EU supported Project, the PTB is developing a high resolution heterodyne interferometer aiming at an accuracy level of 10 pm. Therefore an interferometer setup with a spatial separation of the input beams of different frequencies will be used, similar to the one of the Nanometer Comparator, to avoid periodic nonlinearities. Furthermore a phase meter with a noise level and long term stability in the pm range is necessary as well. To allow the use in different measurement setups the phase meter must be able to work at measurement speeds up to 10 mm/s. Up to now, there is no heterodyne interferometer phase meter with these specifications commercially available. Therefore we develop a phase meter based on a lock-in principle using a 100 MHz VME based ADC board with integrated FPGAs. For high resolution phase measurement in heterodyne interferometry digital lock-in amplifiers were already applied successfully in the past. But the currently available digital lock-in amplifiers are limited by their data acquisition capabilities. Some measurement applications and digital control loops require a continues data rate of some 10 kHz and more with a minimal time delay. |
Zitierung
Weichert, C., Flügge, J., Köning, R., Bosse, H., & Tutsch, R. (2009). Aspects of design and the characterization of a high resolution heterodyne displacement interferometer. Fringe 2009, Nürtingen, 14-16, September 2009, Deutschland. https://doi.org/10.1007/978-3-642-03051-2_44