| Zugriffsnummer | 23973 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development and test of a heterodyne phase measurement electronics |
| Autor(in); Institution |
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Weichert, Christoph; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Köning, Rainer; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Hu, H.; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bosse, Harald; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 9th international conference of the European Society for Precision Engineering and Nanotechnology : June 2nd - June 5th 2009, San Sebastian, Spain: 2 (2009), 372 - 375 |
| Herausgeber(in) |
Van Brussel, Hendrik
|
| ISBN | 978-0-9553082-6-0 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 9th International conference of the European Society for Precision Engineering and Nanotechnology (euspen), San Sebastian, 02-05, June, 2009, Spain |
| Zusammenfassung | For traceable length measurements at the highest level of accuracy, interferometers are often indispensable. A development of a phase meter based on a lock-in principle using a fast multi channel ADC board equipped with FPGAS has been done. To test the stability of the phase measurement electronics a Mach-Zehnder type interferometer has been set up, using the outputs of the recombining beam splitter with a stable 180 degree phase shift as a reference. A noise level equivalent to ± 15 pm and a long time stability of ± 5 pm over 4 days could be achieved. |
Zitierung
Flügge, J., Weichert, C., Köning, R., Hu, H., & Bosse, H. (2009). Development and test of a heterodyne phase measurement electronics. 9th International conference of the European Society for Precision Engineering and Nanotechnology (euspen), San Sebastian, 02-05, June, 2009, Spain.