| Zugriffsnummer | 23734 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Challenges of micro- and nanotechnology on dimensional metrology |
| Autor(in); Institution |
Brand, Uwe; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Bosse, Harald; 5, Fertigungsmesstechnik, PTB-Braunschweig
Härtig, Frank; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Flügge, Jens; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Frase, Carl Georg; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Geckeler, Ralf D.; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Krüger-Sehm, Rolf; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Wilkening, Günter; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | MST news:(2009), 1, 10 - 12 |
| ISSN | 0948-3128 |
| Verlag | Teltow: VDI/VDE Innovation und Technik GmbH |
| Freie Schlagworte | dimensional metrology ; SFM ; nanotechnology |
| Zusammenfassung | Dimensional metrology is indispensable for a reliable production of micro- and nano-scale components and systems. This is true not only for the quality assurance of the individual production steps within complex production chains, such as, e.g., in the modern production of semiconductors with specifications in the nm- and sub-nm range (ITRS roadmap), but also for the fabrication of components and their mounting into complex systems, as in the fields of microsystem technology. The characterisation of nanoparticles, in particular as a basis for a categorisation under health-relevant aspects, represents a new challenge. |
