| Zugriffsnummer | 23396 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces |
| Autor(in); Institution |
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Wurm, Matthias; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | Modeling aspects in optical metrology II:(2009), 73900R-1 - 73900R-9 |
| Schriftenreihe | Proceedings of SPIE: 7390 |
| Herausgeber(in) |
Bosse, Harald; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| ISBN | 978-0-8194-7673-9 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Konferenzangaben | Modeling Aspects in Optical Metrology II, Munich, 15-16, June, 2009, Germany |
| Zusammenfassung | We investigate some prospects of scatterometric methods for quantitative dimensional metrology of periodic micro- and nanostructures like e. g. parameter sensitivity. Additionally we discuss some limitations with respect to numerical or metrological constrains of different scatterometric methods. |
Zitierung
Bodermann, B. & Wurm, M. (2009). Numerical investigations of prospects, challenges, and limitations of non-imaging optical metrology of structured surfaces. Modeling Aspects in Optical Metrology II, Munich, 15-16, June, 2009, Germany. https://doi.org/10.1117/12.830663