| Zugriffsnummer | 23296 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development of a three-dimensional metrological interlayer deformation imaging system |
| Autor(in); Institution |
Li, Zhi; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Gao, Sai; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Herrmann, Konrad; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of ISMTII 2009 : the 9th International Symposium on Measurement Technology and Intelligent Instruments: 4 (2009), 4-287 - 4-291 |
| Verlag | Saint-Petersburg: D.S. Rozhdestvensky Optical Society |
| Konferenzangaben | ISMTII 2009, 9th International Symposium on Measurement Technology and Intelligent Instruments, Saint-Petersburg, 29, June - 02, July, 2009, Russia |
| Freie Schlagworte | nanoindentation ; depth-sensing indentation ; small-volume material testing ; confocal scanning microscopy ; differential confocal microscopy ; local topography measurement |
| Zusammenfassung | Finite element analysis (FEA) models are now widely used for interpreting the physical procedure of nanoindentation tests and extracting from experimental data the mechanical properties of small volumes of material including elastic modulus, hardness, yield strength etc. In the meantime, the demand for verifying those different FEA models became stronger and stronger. Here a three-dimensional metrological interlayer deformation imaging (3D-MIDI) system is proposed, which can quantitatively measure the nano-deformation of the surface under nanoindentation test, and therefore provide an effective way to testify the validity and accuracy of current available FEA models. Preliminary experiments demonstrate that the prototype of the 3D-MIDI system features high resolution (up to ≈ 1 nm) and that it is applicable for in-situ measurements and reliable for dynamic applications. |
Zitierung
Li, Z., Gao, S., & Herrmann, K. (2009). Development of a three-dimensional metrological interlayer deformation imaging system. ISMTII 2009, 9th International Symposium on Measurement Technology and Intelligent Instruments, Saint-Petersburg, 29, June - 02, July, 2009, Russia.