| Zugriffsnummer | 23205 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | Suppression of aliasing in multi-sensor scanning absolute profile measurement |
| Autor(in); Institution |
Wiegmann, Axel; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Optics Express: 17 (2009), 13, 11098 - 11106 |
| Availability | [online only] |
| ISSN | 1094-4087 (ONLINE) |
| DOI | |
| URL | |
| Verlag | Optical Society of America |
| Klassifikationscode | OCIS: 120.0120 ; OCIS: 120.3180 ; OCIS: 120.3940 ; OCIS: 120.6650 ; OCIS: 100.3008 |
| Freie Schlagworte | Instrumentation ; measurement ; metrology ; Interferometry ; Surface measurements ; Image recognition ; algorithm ; filter |
| Zusammenfassung | The task of anti-aliasing in absolute profile measurement by multi-sensor scanning techniques is considered. Simulation results are presented which demonstrate that aliasing can be highly reduced by a suitable choice of the scanning steps. The simulation results were confirmed by results obtained for interferometric measurements (Nyquist frequency 1/646 μm-1) on a specifically designed chirp specimen with sinusoidal waves of amplitude 100 nm and wavelengths from 2.5 mm down to 19 μm. |
| Kostenfreier Zugang | Open Access Gold |