| Zugriffsnummer | 22800 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Comparison of power measurement standards for excimer lasers between PTB and NIST |
| Autor(in); Institution |
Kück, Stefan; 4.5, Optische Technologien, PTB-Braunschweig
Brandt, Friedhelm; 4.5, Optische Technologien, PTB-Braunschweig
Dowell, M.L.; National Institute of Standards and Technology, Boulder, USA
Cromer, C.L.; National Institute of Standards and Technology, Boulder, USA
Keenan, D.A.; National Institute of Standards and Technology, Boulder, USA
|
| Quelle/Jahr | Proceedings of NEWRAD 2008 : 10th International Conference on New Developments and Applications in Optical Radiometry:(2008), 317 - 318 |
| Verlag | Daejeon: KRISS |
| Konferenzangaben | 10th International Conference on New Developments and Applications in Optical Radiometry, Daejeon, 13-16, October, 2008, Korea |
| Zusammenfassung | We report results of the first bilateral laser power comparison for 248-nm KrF excimer lasers accomplished by the National Metrology Institutes of Germany and of the United States of America. Laser transfer standards for average power were calibrated at both laboratories. The average powers were between 0.5 W and 2 W. The relative agreement was between 1 × 10-3 and 6 × 10-3, which is well within the combined uncertainties. |
Zitierung
Kück, S., Brandt, F., Dowell, M., Cromer, C., & Keenan, D. (2008). Comparison of power measurement standards for excimer lasers between PTB and NIST. 10th International Conference on New Developments and Applications in Optical Radiometry, Daejeon, 13-16, October, 2008, Korea.