| Zugriffsnummer | 22786 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Peer Review | mit Peer Review |
| Sprache | Englisch |
| Titel | A scatterometry inverse problem in optical mask technology |
| Autor(in); Institution |
Model, Regine; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Rathsfeld, Andreas; Weierstraß-Institut für Angewandte Analysis und Stochastik, Berlin, GERMANY
Groß, Hermann; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
Wurm, Matthias; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Bodermann, Bernd; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
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| Quelle/Jahr | Journal of Physics: Conference Series: 135 (2008), 8 S. |
| Artikelnummer | 012071 |
| ISSN | 1742-6588 (PRINT) ; 1742-6596 (ONLINE) |
| DOI | |
| Verlag | Bristol: IOP Publ. |
| Konferenzangaben | 6th International Conference on Inverse Problems in Engineering: Theory and Practice, Dourdan, 15-19, June, 2008, France |
| Freie Schlagworte | scatterometry ; inverse problem |
| Zusammenfassung | We discuss the solution of the inverse problem in scatterometry i.e. the determination of periodic surface structures from light diffraction patterns. With decreasing details of lithography masks, increasing demands on metrology techniques arise. By scatterometry as a non-imaging indirect optical method critical dimensions (CD) like side-wall angles, heights, top and bottom widths are determined. The numerical simulation of diffraction is based on the finite element solution of the Helmholtz equation. The inverse problem seeks to reconstruct the grating geometry from measured diffraction patterns. The inverse operator maps efficiencies of diffracted plane wave modes to the grating parameters. We employ a Newton type iterative method to solve the resulting minimum problem. The reconstruction quality surely depends on the angles of incidence, on the wave lengths and/or the number of propagating scattered wave modes and will be discussed by numerical examples. |
| Kostenfreier Zugang | Open Access Gold |