| Zugriffsnummer | 22682 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Investigations of shapes of microstructure-edges with atomic force microscopy and correlation with optical linewidth measurements |
| Autor(in); Institution |
Geuther, Heinrich; 4.22, Bildanalyse, PTB-Braunschweig
Schröder, Klaus-Peter; 4.22, Bildanalyse, PTB-Braunschweig
Mirandé, Werner; 4.22, Bildanalyse, PTB-Braunschweig
|
| Quelle/Jahr | Ultraprecision in manufacturing engineering : proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, May 1994, Aachen, Germany:(1994), 322 - 325 |
| Herausgeber(in) |
Weck, Manfred
Kunzmann, Horst; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| ISBN | 3-926832-11-8 |
| Verlag | Duisburg: Rhiem |
| Konferenzangaben | 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, May, 1994, Germany |
Zitierung
Geuther, H., Schröder, K.-P., & Mirandé, W. (1994). Investigations of shapes of microstructure-edges with atomic force microscopy and correlation with optical linewidth measurements. 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, May, 1994, Germany.