| Zugriffsnummer | 22679 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | FEM study of monolithic silicon translation mechanisms for a 10 μm scanning x-ray interferometer |
| Autor(in); Institution |
Kuetgens, Ulrich; 6.13, Röntgenmetrologie, PTB-Braunschweig
Becker, Peter; 6.13, Röntgenmetrologie, PTB-Braunschweig
Bertolotto Bianc, G.; Universita di Torino, Istituto di Fisica Generale, Torino, ITALY
Jäger, Valentin; 5.31, Zentraler Gerätebau - Fertigung, PTB-Braunschweig
Stümpel, Jürgen; 6.13, Röntgenmetrologie, PTB-Braunschweig
Zosi, G.; Universita di Torino, Istituto di Fisica Generale, Torino, ITALY
|
| Quelle/Jahr | Ultraprecision in manufacturing engineering : proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, May 1994, Aachen, Germany:(1994), 118 - 121 |
| Herausgeber(in) |
Weck, Manfred
Kunzmann, Horst; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| ISBN | 3-926832-11-8 |
| Verlag | Duisburg: Rhiem |
| Konferenzangaben | 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, May, 1994, Germany |
Zitierung
Kuetgens, U., Becker, P., Bertolotto Bianc, G., Jäger, V., Stümpel, J., & Zosi, G. (1994). FEM study of monolithic silicon translation mechanisms for a 10 μm scanning x-ray interferometer. 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, May, 1994, Germany.