| Zugriffsnummer | 22674 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Position sensing of microstructures in the nanometer range using CCD sensors |
| Autor(in); Institution |
Danzebrink, Hans-Ulrich; 5.11, Maßteilungen, PTB-Braunschweig
Häßler-Grohne, Wolfgang; 5.11, Maßteilungen, PTB-Braunschweig
|
| Quelle/Jahr | Ultraprecision in manufacturing engineering : proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, May 1994, Aachen, Germany:(1994), 307 - 310 |
| Herausgeber(in) |
Weck, Manfred
Kunzmann, Horst; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| ISBN | 3-926832-11-8 |
| Verlag | Duisburg: Rhiem |
| Konferenzangaben | 3rd International Conference on Ultraprecision in Manufacturing Engineering (UME), Aachen, 2-6, May, 1994, Germany |
| Zusammenfassung | The results presented show that even the use of standard CCD cameras allows a reproducibility in the nanometer range to be achieved. The main advantage of using CCD cameras instead of the scanning microscope is that arbitrary geometrical forms can be measured, whereas the scanning slit microscope is designed mainly for orthogonal structures. A calibration using calibrated grid plates as reference standards for CCD-based measuring systems is recommended. |
