| Zugriffsnummer | 22673 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | 3-dimensional surface analysis by a method using non-orthogonal periodic functions |
| Autor(in); Institution |
Ahbe, Thomas; 5.43, Schichtdicke, PTB-Berlin
Bienias, Martin; 5.43, Schichtdicke, PTB-Berlin
Hasche, Klaus; 5.4, Industrielle Meßtechnik, PTB-Berlin
Thiele, Kerstin; 5.43, Schichtdicke, PTB-Berlin
|
| Quelle/Jahr | Ultraprecision in manufacturing engineering : proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, May 1994, Aachen, Germany:(1994), 287 - 290 |
| Herausgeber(in) |
Weck, Manfred
Kunzmann, Horst; 5, Fertigungsmesstechnik, PTB-Braunschweig
|
| ISBN | 3-926832-11-8 |
| Verlag | Duisburg: Rhiem |
| Konferenzangaben | 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, May, 1994, Germany |
| Zusammenfassung | The application of a sinusoidal grating to the analysis of metrological parameters of the NANOSCOPE may serve as a further example. In a first stage of experiments the direction of the grating in the horizontal plane was changed systematically and all other conditions were held constant. The evaluation of the measurement data sets showed that the values of the wavelength of the dominating first wave of the grating differ not more than 1 % referred to the nominal value. From this it has been derived that the sensitivity of the NANOSCOPE does not depend significantly from the direction in a x-y-plane. |
