| Zugriffsnummer | 22643 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Chemical character of BCxNy layers grown by CVD with trimethylamine borane |
| Autor(in); Institution |
Baake, O.; Technische Universität Darmstadt, Department of Materials Science, Darmstadt, GERMANY
Hoffmann, P.S.; Technische Universität Darmstadt, Department of Materials Science, Darmstadt, GERMANY
Klein, A.; Technische Universität Darmstadt, Department of Materials Science, Darmstadt, GERMANY
Pollakowski, Beatrix; 7.1, Photonenradiometrie, PTB-Berlin
Beckhoff, Burkhard; 7.1, Photonenradiometrie, PTB-Berlin
Ensinger, W.; Technische Universität Darmstadt, Department of Materials Science, Darmstadt, GERMANY
Kosinova, M.; Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, RUSSIA
Fainer, N.; Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, RUSSIA
Sulyaeva, V.S.; Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, RUSSIA
Trunova, V.; Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, RUSSIA
|
| Quelle/Jahr | X-Ray Spectrometry: 38 (2009), 1, 68 - 73 |
| ISSN | 0049-8246 (PRINT) ; 1097-4539 (ONLINE) |
| DOI | |
| Verlag | Chichester [u.a.]: Wiley |
| Zusammenfassung | Layers of BCxNy were produced in a chemical vapour deposition (CVD) process using trimethylamine borane with He, N2, and NH3, respectively, as precursor. These layers deposited on Si (100) wafers were characterized chemically by X-ray photoelectron spectroscopy (XPS) and synchrotron radiation-based total reflection X-ray fluorescence analysis combined with near-edge X-ray absorption fine structure spectroscopy (TXRF-NEXAFS). As a result, the composition of the material produced without NH3 is a B-C bonds containing compound with an atomic relation 1 : 1. Adding NH3 with a partial pressure of up to about 1.3 Pa the product could be identified as B2C2N. Increasing the partial pressure of NH3 to 1.7 and 2.1 Pa the product was enriched in nitrogen yielding a compound characterized as h-BCN. In all cases an impurity of oxygen was observed. |
Zitierung
Baake, O., Hoffmann, P., Klein, A., Pollakowski, B., Beckhoff, B., Ensinger, W., Kosinova, M., Fainer, N., Sulyaeva, V., & Trunova, V. (2009). Chemical character of BCxNy layers grown by CVD with trimethylamine borane. X-Ray Spectrometry, 38(1), 68–73. https://doi.org/10.1002/xrs.1117