| Zugriffsnummer | 22311 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Modelling of the tip wear for Scanning Probe Microscopes [poster] |
| Autor(in); Institution |
Xu, Min; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
Dziomba, Thorsten; 5.2, Dimensionelle Nanometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Oberflächenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | NanoScale 2008, 8th Seminar on Quantitative Microscopy (QM) and 4th Seminar on Nanoscale Calibration Standards and Methods: Programme and short abstracts:(2008), 26 |
| Herausgeber(in) |
Physikalisch-Technische Bundesanstalt
|
| Verlag | Torino: |
| Konferenzangaben | Nanoscale 2008, Torino, 22-23, September, 2008, Italy |
| Zusammenfassung | Scanning probe microscopes (SPMs) are essential for dimensional metrology from micro to atomic scale. The image of the SPM is in fact the convolution result of the tip geometry and the artefact, therefore it is necessary to acquire the detailed knowledge of the tip geometry. In one image scanned with the SPM, the tip geometry doesn’t keep constant, it varies because of wear. Tip wear is inevitable during imaging process, especially for contact and tapping mode Atomic Force Microscopes, which is a widely used type of the SPMs. The affect of tip geometry and tip wear on image is shown in Figure 1. The tip wear is dependent on the used time, the artefact structure, the scan speed, and set point. To study the impact of tip geometry and tip wear on the measurement of SPM, the two processes are modelled. The model is applied in our virtual SPM project and their impacts on the measurement are simulated. As examples, the above model is incorporated in one-dimensional and two-dimensional grating measurement uncertainty evaluation module. Their influence on the evaluation of the pitch value and the artefact’s irregularity are quantitatively investigated. |
