| Zugriffsnummer | 22019 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Aspects of scanning force microscope probes and their effects on dimensional measurement |
| Autor(in); Institution |
Yacoot, Andrew; National Physical Laboratory, Teddington, UK
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Journal of Physics D: 41 (2008), 103001-1 - 103001-46 |
| ISSN | 0022-3727 |
| DOI | |
| URL | |
| Verlag | Bristol: IOP |
| Zusammenfassung | The review will describe the various scanning probe microscopy tips and cantilevers used today for scanning force microscopy and magnetic force microscopy. Work undertaken to quantify the properties of cantilevers and tips, e.g. shape and radius, is reviewed together with an overview of the various tip-sample interactions that affect dimensional measurements. |
