| Zugriffsnummer | 21697 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | Tactile probes for dimensional metrology with micro components at nanometre resolution |
| Autor(in); Institution |
Peiner, Erwin; TU Braunschweig, Institut für Halbleitertechnik, Braunschweig, GERMANY
Balke, Michael; TU Braunschweig, Institut für Halbleitertechnik, Braunschweig, GERMANY
Doering, Lutz; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Brand, Uwe; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 19 (2008), 6, 064001-1 - 064001-8 |
| ISSN | 0957-0233 |
| DOI | |
| URL | |
| Verlag | Bristol: IOP |
| Konferenzangaben | 10th CIRP Conference on Computer Aided Tolerancing, Erlangen, 21-23, March, 2007, Germany |
| Freie Schlagworte | piezoresistive cantilever ; tactile probing ; traceable metrology ; bulk micromachining ; wear testing |
| Zusammenfassung | Traceable metrology of nanoscale dimension at micro components is addressed. Silicon cantilevers are designed as tactile probe sensors for quality assurance of high-aspect ratio micro parts. The cantilever comprises a low-noise piezoresistive strain gauge avoiding the geometrical restrictions by conventional optical read-out. Prototype sensors of length of 1.5 to 5.0 mm, width of 30 to 200 μm and height of 25 to 50 μm have been realised using silicon bulk micromachining. Calibration of the cantilevers was performed by probing the weighing pan of an electronic balance at forces up to 400 μN. Sensor performance was tested by profiling groove and roughness artefacts which show close agreement with the calibration sheet data. Low wear of few nm/m was detected during scanning a steel artefact at a probing force of 30 μN and a probing velocity of 0.5 mm/s confirming ruggedness and low inertia of the novel cantilever sensors required for high-throughput in-process metrology. |
