| Zugriffsnummer | 21150 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | ESAD shearing deflectometry: A primary flatness standard with sub-nanometer uncertainty [invited session paper] |
| Autor(in); Institution |
Geckeler, Ralf D.; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of ISMTII 2007 : the 8th International Symposium on Measurement Technology and Intelligent Instruments:(2007), 259 - 262 |
| Herausgeber(in) |
JSPE Technical Committee for Intelligent Nano-Measure
|
| Verlag | Sendai: Tohoku University |
| Konferenzangaben | International Symposium on Measurement Technology and Intelligent Instruments (ISMTII), Sendai, 24-27, September, 2007, Japan |
| Freie Schlagworte | Deflectometry ; Profilometry ; Flatness ; Standard ; Autocollimator ; Angle Measurement ; Pentaprism ; Slope ; Topography ; Precision Metrology |
| Zusammenfassung | To overcome the limitations of conventional interferometry, a technique has been developed which allows the absolute topography measurement of near-plane and slightly curved optical surfaces of arbitrary size with low measurement uncertainty. The Extended Shear Angle Difference (ESAD) method combines deflectometric and shearing techniques in a unique way to minimize measurement errors and to optimize measurand traceability. A device for the topography measurement of optical surfaces up to 500 mm in diameter, achieving sub-nanometer repeatability, reproducibility and uncertainty, was built at the Physikalisch-Technische Bundesanstalt (PTB). The ESAD method is optimally suited for creating a primary standard for straightness and flatness with highest accuracy by which the three-flat test or liquid mirrors can be replaced as starting points of the traceability chain in flatness measurement. In the following, the improved ESAD device which uses optimized opto-mechanical components is presented. Central aspects of the proper design and use of deflectometric systems are highlighted, including the optimal use of pentaprisms. |
