| Zugriffsnummer | 21017 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Tactile and optical microsensors - test procedures and standards |
| Autor(in); Institution |
Neuschaefer-Rube, Ulrich; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Neugebauer, Michael; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Ehrig, Wiebke; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Bartscher, Markus; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Hilpert, Uwe; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of ISMTII 2007 : the 8th International Symposium on Measurement Technology and Intelligent Instruments:(2007), 203 - 206 |
| Herausgeber(in) |
JSPE Technical Committee for Intelligent Nano-Measure
|
| Verlag | Sendai: Tohoku University |
| Konferenzangaben | ISMTII 2007, 8th International Symposium on Measurement Technology and Intelligent Instruments, Sendai, 24-27, September, 2007, Japan |
| Freie Schlagworte | Dimensional measurement ; Microsensors ; Test procedures ; Reference standards ; Traceability |
| Zusammenfassung | This paper presents procedures and standards to test tactile and optical microsensors and micro-computed tomography (CT) systems. The tests are similar to the established tests for classical coordinate measuring machines and assess local and global sensor characteristics. For this purpose, adequate and miniaturized reference standards were manufactured, calibrated and tested. In addition, task-specific reference standards have been realized to determine special sensor characteristics such as the maximum slope angle measurable by optical sensors or specific errors of tactile-optical microprobes measuring deep microholes. |
Zitierung
Neuschaefer-Rube, U., Neugebauer, M., Ehrig, W., Bartscher, M., & Hilpert, U. (2007). Tactile and optical microsensors - test procedures and standards. ISMTII 2007, 8th International Symposium on Measurement Technology and Intelligent Instruments, Sendai, 24-27, September, 2007, Japan.