| Zugriffsnummer | 20747 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Compensation of wavelength dependent image shifts in imaging optical interferometry |
| Autor(in); Institution |
Schödel, René; 5.4, Interferometrie an Maßverkörperungen, PTB-Braunschweig
|
| Quelle/Jahr | Applied Optics: 46 (2007), 30, 7464 - 7468 |
| ISSN | 0003-6935 |
| DOI | |
| Verlag | Washington, DC: OSA |
| Klassifikationscode | OCIS: 120.0120 ; OCIS: 120.3180 ; OCIS: 110.0110 ; OCIS: 100.3175 |
| Zusammenfassung | In modern interferometers for absolute length measurements applying phase stepping interferometry several different wavelengths are used as light source and the interfogramm is projected to a CCD-camera array. Such interferometers are equipped with wedged optical components as windows and beam splitters, to prevent additional interferences. The wedged optics cause the position of a test piece within the interferogramm related to the camera pixel coordinates to be dependent on the wavelengths used. This effect depends on the wedge angels and the thicknesses of optical components but also on their distances within in the interferometer's optical pathway. This paper gives a quantitative analysis and suggests a compensation of this dispersion effect by an additional wedge plate outside the interferometer. |
