| Zugriffsnummer | 20599 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | The determination of the efficiency of energy-dipersive X-ray spectrometers by a new reference material |
| Autor(in); Institution |
Alvisi, M.; E.N.E.A., Scientific and Technological unit Materials, Brindisi, ITALY
Blome, M.; HDZ-Herzogenrather Dienstleistungszentrum GbR, Herzogenrath, GERMANY
Griepentrog, M.; Bundesanstalt für Materialforschung und -prüfung (BAM), Berlin, GERMANY
Hodoroaba, V.-D.; Bundesanstalt für Materialforschung und -prüfung (BAM), Berlin, GERMANY
Karduck, P.; HDZ-Herzogenrather Dienstleistungszentrum GbR, Herzogenrath, GERMANY
Mostert, M.; SAMxSA, Levens, FRANCE
Nacucchi, M.; E.N.E.A., Scientific and Technological unit Materials, Brindisi, ITALY
Procop, Mathias; Bundesanstalt für Materialforschung und -prüfung (BAM), Berlin, GERMANY
Rohde, M.; RönTec GmbH, Berlin, GERMANY
Scholze, Frank; 7.1, Photonenradiometrie, PTB-Berlin
Statham, P.; Oxford Instruments Analytical Ltd., High Wycombe, UK
Terborg, R.; RönTec GmbH, Berlin, GERMANY
Thiot, J.-F.; SAMx, Levens, FRANCE
|
| Quelle/Jahr | Microscopy and Microanalysis: 12 (2006), 5, 406 - 415 |
| ISSN | 1431-9276 |
| DOI | |
| Verlag | New York, NY: Cambridge Univ. Press |
| Freie Schlagworte | energy dispersive X-ray spectrometry ; standardless analysis ; X-ray detectors ; detection efficiency ; spectrometer calibration |
| Zusammenfassung | A calibration procedure for the detection efficiency of energy dispersive X-ray spectrometers (EDS) used in combination with scanning electron microscopy (SEM) for standardless electron probe microanalysis (EPMA) is presented. The procedure is based on the comparison of X-ray spectra from a reference material (RM) measured with the EDS to be calibrated and a reference EDS. The RM is certified by the line intensities in the X-ray spectrum recorded with a reference EDS and by its composition. The calibration of the reference EDS is performed using synchrotron radiation at the radiometry laboratory of the Physikalisch-Technische Bundesanstalt. Measurement of RM spectra and comparison of the specified line intensities enables a rapid efficiency calibration on most SEMs. The article reports on studies to prepare such a RM and on EDS calibration and proposes a methodology that could be implemented in current spectrometer software to enable the calibration with a minimum of operator assistance. |
Zitierung
Alvisi, M., Blome, M., Griepentrog, M., Hodoroaba, V.-D., Karduck, P., Mostert, M., Nacucchi, M., Procop, M., Rohde, M., Scholze, F., Statham, P., Terborg, R., & Thiot, J.-F. (2006). The determination of the efficiency of energy-dipersive X-ray spectrometers by a new reference material. Microscopy and Microanalysis, 12(5), 406–415. https://doi.org/10.1017/s1431927606060557