| Zugriffsnummer | 20568 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | High precision line scale calibrations with the PTB nanometer comparator |
| Autor(in); Institution |
Flügge, Jens; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Köning, Rainer; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Bosse, Harald; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 7th international conference, European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany: 2 (2007), 5 - 8 |
| Herausgeber(in) |
Thornett, E.
|
| ISBN | 0-9553082-2-4 ; 978-0-9553082-2-2 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 7th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 20-24, May, 2007, UK |
| Zusammenfassung | The Nanometer Comparator is a high precision one dimensional length measurement machine using an interferometer in vacuum for investigations and calibrations of line scales, linear encoders, length gauges, photo masks and laser interferometers up to 610 mm. After optimisations regarding the Abbe error and the optical microscope it is now possible to calibrate line scales of high quality with respect to uniformity of line structures and flatness of surfaces like the Heidenhain "Nano3" line cale design with an expanded measurement uncertainty below 5 nm. |
