| Zugriffsnummer | 20564 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | An angular reversal technique for error separation between a dual axis electronic autocollimator and a PZT tilting platform |
| Autor(in); Institution |
Probst, Reinhard; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Fütterer, Gerald; 5.2, Längen- und Winkelteilungen, PTB-Braunschweig
Illemann, Jens; 1.2, Festkörpermechanik, PTB-Braunschweig
Mokros, J.; Slovak Institute of Metrology, SLOVAK REPUBLIC
Lui, P. K.; Center for Measurement Standards, TAIWAN
Bachish, E.; St. Petersburg States Electrotechnical University, RUSSIA
|
| Quelle/Jahr | Proceedings of the 7th international conference, European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany: 2 (2007), 121 - 124 |
| Herausgeber(in) |
Thornett, E.
|
| ISBN | 0-9553082-2-4 ; 978-0-9553082-2-2 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 7th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 20-24, May, 2007, UK |
| Zusammenfassung | The nonlinear angular crosstalk errors of a dual axis electronic autocollimator and a piezo tip/tilt platform have been measured by application of a reversal technique in a range of 200 arcsec. A reproducibility of 0.005 arcsec is obtained for the error separation by this technique. It is also shown that the tilting platform is a useful tool for fast investigation of the nonlinear scaling errors of the autocollimator. |
Zitierung
Probst, R., Fütterer, G., Illemann, J., Mokros, J., Lui, P. K., & Bachish, E. (2007). An angular reversal technique for error separation between a dual axis electronic autocollimator and a PZT tilting platform. 7th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 20-24, May, 2007, UK.