| Zugriffsnummer | 20547 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Turning scanning probe microscopy into a more quantitative method |
| Übersetzungstitel | Prevratscenie rastrovoj zondovoj mikroskopii v bolee kolitcestvennyj metod |
| Autor(in); Institution |
Dziomba, Thorsten; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Dai, Gaoliang; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Ritter, Martin; Federal Institute for Materials Research and Testing (BAM), Berlin, GERMANY
Shaleev, Michael; Russian Academy of Sciences, Institute for Physics of Microstructures (IPM-RAS), Nizhny Novgorod, RUSSIA
|
| Quelle/Jahr | 2-j Mezdunarodnyj Konkurs Lucsij Molodoj Metrolog KOOMET - 2007 = 2nd International Competition The Best Young Metrologist of COOMET - 2007:(2007), 59 - 63 |
| Herausgeber(in) |
Sydorenko, G. S.
|
| Verlag | Charkov: NSC, Institute of Metrology |
| Konferenzangaben | 2nd International Competition The Best Young Metrologist of COOMET 2007, Charkov, 19-20, June, 2007, Ukraine |
| Freie Schlagworte | Scanning Probe Microscopy ; SPM ; Scanning Force Microscopy ; SFM ; AFM ; Traceability ; Nanometrology ; 3D Standards ; roughness ; Standardization ; landmark-based calibration |
| Zusammenfassung | THIS TALK WAS AWARDED THE FIRST PRIZE IN THE COMPETITION Scanning Probe Microscopy (SPM) is used today not only in research and development but increasingly also in many fields of industrial fabrication and inspection. High-technologies such as semiconductor fabrication and nanotechnology attach great importance to the quantitative information these instruments provide. Thus, SPM is widely regarded as one the key measurement methods for future technologies. Consequently, National Metrology Institutes (NMI) face the challenge to provide measurement technology, transfer standards and written documentary standards or guidelines on SPM characterization & calibration methods in order to enable the SPM user to calibrate his instrument traceable to the SI unit metre. Furthermore, when it comes to the further reduction of measurement uncertainty, intensive research is required to understand the interaction between probe and sample on the nanometre and sub-nanometre level. This report gives an overview of several SPM-related research activities at PTB. |
