| Zugriffsnummer | 20522 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Fabrication of sputtered resistance strain gauges on curved surfaces |
| Autor(in); Institution |
Hagedorn, Daniel; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Löffler, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 7th international conference, European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany: 2 (2007), 453 - 456 |
| Herausgeber(in) |
Thornett, E.
|
| ISBN | 0-9553082-2-4 ; 978-0-9553082-2-2 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 7th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 20-24, May, 2007, UK |
| Freie Schlagworte | Resistance strain gauge ; thin film technology ; LASER exposure |
| Zusammenfassung | We have developed a new course of production which meets the requirements to fabricate Resistance Strain Gauges (RSG) using thin film technology and LASER photolithography to pattern conducting structures on flat surfaces as well as on curved surfaces. In a first stage, the whole course of fabrication as described below was tested successfully on silicon wafers, using partly PTBs clean room facility and equipment. In order to fabricate RSGs on curved or cylindrical surfaces, a computer-controlled coating system for applying photoresist to the work piece, and an precision positioning system have been developed, manufactured and successfully put to use. |
