| Zugriffsnummer | 20394 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Development of a multi-functional microforce actuator |
| Autor(in); Institution |
Gao, Sai; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Herrmann, Konrad; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 7th international conference, European Society for Precision Engineering and Nanotechnology : May 20th - May 24th 2007, Bremen, Germany: 1 (2007), 290 - 293 |
| Herausgeber(in) |
Thornett, E.
|
| ISBN | 0-9553982-2-4 ; 978-0-9553082-2-2 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 7th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen), Bremen, 20-24, May, 2007, Germany |
| Freie Schlagworte | microsystem ; MEMS ; microforce actuator ; comb-drive actuator ; tensile test ; free standing film |
| Zusammenfassung | With the increasing applications of thin films in microsystems, microelectromechanical systems (MEMS), etc., for protective and/or functional aims, the microtensile testing method gains more and more interest due to its simple and straightforward principle in determining the mechanical properties of the material under test. This paper proposes a novel loading component suited for tensile testing of free standing thin films, which is called electrostatic comb-drive MEMS actuator. The basic requirements to the actuator used for micro-tensile testing of free standing films are discussed in detail, and a designed electrostatic comb-drive actuator with a driving force up to 500 μN (50 V) within a displacement range of 7 μm is presented. |
