| Zugriffsnummer | 20174 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Novel standards for AFM, other SPM methods, and nano-analytical techniques |
| Autor(in); Institution |
Dziomba, Thorsten; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Weimann, Thomas; 2.4, Quantenelektronik, PTB-Braunschweig
Hinze, Peter; 2.4, Quantenelektronik, PTB-Braunschweig
Sievers, Sibylle; 2.5, Halbleiterphysik und Magnetismus, PTB-Braunschweig
Shaleev, M.; Institute for Physics of Microstructures IPM-RAS, Nizhniy Novgorod, RUSSIA
Ritter, M.; Federal Institute for Materials Research and Testing (BAM), Berlin, GERMANY
Kranzmann, A.; Federal Institute for Materials Research and Testing (BAM), Berlin, GERMANY
Senoner, M.; Federal Institute for Materials Research and Testing (BAM), Berlin, GERMANY
Unger, W.; Federal Institute for Materials Research and Testing (BAM), Berlin, GERMANY
|
| Quelle/Jahr | Nanofizika i nanoelektronika : XI mezdunarodnyj simpozium. T. 1:(2007), 103 - 106 |
| Verlag | Niznij Novgorod: Institut Fiziki Mikrostruktur |
| Konferenzangaben | The XI Annual Symposium of "Nanophysics and Nanoelectronics" at the Institute for Physics of Microstructures RAS, N. I. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 10-14, March, 2007, Russia |
| Zusammenfassung | Many techniques advance further into the submicrometer and the nanometre range. With the continuing miniaturization in many industries and the evolvement of novel key industries such as nanotechnology, many high resolution measurement methods are increasingly used not only in reasearch & development, but rapidly introduced for quality inspection and failure analysis, e. g. in semiconductor fabrication. Consequently, suitable standards are urgently needed for the characterization & traceable calibration not only for purely dimensional measurement techniques such as AFM, but also for highresolution spatial-chemical/analytical methods and techniques relying on the exploitation of other physical interactions like Magnetic Force Microscopy (MFM). In several joint projects, different divisions from PTB as National Metrology Institute (NMI) of Germany and BAM (Federal Institute for Materials Research & Testing) are developing novel standards and reference samples with others NMIs worldwide and the relevant industries, with IPM Nizhny Novgorod being partly involved as well. Many of these standards are being discussed for inclusion in guidelines (e. g. VDI/VDE) & international written standards (ISO). |
Zitierung
Dziomba, T., Koenders, L., Weimann, T., Hinze, P., Sievers, S., Shaleev, M., Ritter, M., Kranzmann, A., Senoner, M., & Unger, W. (2007). Novel standards for AFM, other SPM methods, and nano-analytical techniques. The XI Annual Symposium of "Nanophysics and Nanoelectronics" at the Institute for Physics of Microstructures RAS, N. I. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 10-14, March, 2007, Russia.