| Zugriffsnummer | 20152 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Diamond-like carbon for MEMS |
| Autor(in); Institution |
Peiner, Erwin; TU Braunschweig, Institute for Semiconductor Technology (IHT), Braunschweig, GERMANY
Tibrewala, Arti; TU Braunschweig, Institute for Semiconductor Technology (IHT), Braunschweig, GERMANY
Bandorf, Ralf; Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, GERMANY
Lüthje, Holger; Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig, GERMANY
Doering, Lutz; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | The 17th Micromechanics Europe Workshop, MME'06 [technical digest]:(2006), 137 - 140 |
| ISBN | 0-85432-848-3 |
| Verlag | Southampton: Univ. |
| Konferenzangaben | 17th Workshop on Micromachining, Micromechanics and Microsystems - MME 2006, Southampton, 03-05, September, 2006, UK |
| Freie Schlagworte | Diamond-like carbon (DLC) ; piezoresistive gauge factor ; micromachined boss membrane sensor |
| Zusammenfassung | Sputter-deposited amorphous diamond-like carbon (DLC, a-C) on silicon has been investigated with respect to micro electro mechanical systems (MEMS) applications. Sputtered a-C with a content of diamond-like sp3 bonded carbon of around 25 % showed a high hardness of up to 30 GPa. Self supporting cantilevers of 0.5 μm in thickness, several hundreds of μm in length and some tens of μm in width have been successfully realized using lift-off patterning of DLC and anisotropic silicon etching. The mechanical properties of DLC (Young’s modulus, stress, stress gradient fracture strength) were characterized by cantilever deflection analyses. DLC strain gauge resistors integrated on micromachined silicon boss-membranes were investigated under tensile and compressive loading. Piezoresistive gauge factors in the range of 20-30 were observed at temperatures between room temperature and 50°C |
