| Zugriffsnummer | 19588 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Design of a precision micro-assembly device with 6 degree of freedom |
| Autor(in); Institution |
Meeß, Rudolf; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
Löffler, Frank; 5.5, Wissenschaftlicher Gerätebau, PTB-Braunschweig
|
| Quelle/Jahr | Proceedings of the 6th international conference, European Society for Precision Engineering and Nanotechnology : May 28th - June 1st, 2006, Baden bei Wien, Vienna: 2 (2006), 64 - 67 |
| Herausgeber(in) |
Zervos, H.
|
| ISBN | 0-9553082-0-8 ; 978-0-9553082-0-8 |
| Verlag | Bedford: Euspen |
| Konferenzangaben | 6th International conference and 8th annual general meeting of the european society for precision engineering and nanotechnology, Baden/Wien, 28, May - 01, June, 2006, Austria |
| Freie Schlagworte | DOF ; micro-assembly device |
| Zusammenfassung | Micro assembly devices are known with parallel, serial or hybrid robotics. Motion in six degree of freedom with 6 actuators may here be limited by small tool-rotations, collision or degeneration. Furthermore, optical inspection with fixed imaging devices in one or more projections may be difficult due to the small field of view or collision with the robotics. The design of the novel degree of freedom (DOF) micro assembly device presented in this paper follows another approach. Double-serial kinematics offer a compact, high precision set-up with best access to the working space. Workpieces can be entered in almost any orientation and positioned relative to the tool in all 6 degrees of freedom with high resolution in position (sub-µm) and orientation. Different types of grippers can be mounted. The device is applicable both, for high-vacuum with inspection by electron microscopy, and for ambient conditions with inspection by additional light microscopy in different perpendicular projections. It facilitates unrestriced observation in high resolution and in various projections during operation. |
Zitierung
Meeß, R. & Löffler, F. (2006). Design of a precision micro-assembly device with 6 degree of freedom. 6th International conference and 8th annual general meeting of the european society for precision engineering and nanotechnology, Baden/Wien, 28, May - 01, June, 2006, Austria.