| Zugriffsnummer | 19489 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Piezoresistive diamond-like carbon micro strain gauges |
| Autor(in); Institution |
Peiner, Erwin; TU Braunschweig, IHT, Braunschweig, GERMANY
Tibrewala, Arti; TU Braunschweig, IHT, Braunschweig, GERMANY
Lüthje, Holger; Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, GERMANY
Bandorf, Ralf; Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, GERMANY
Biehl, Saskia; Fraunhofer-Institut für Schicht- und Oberflächentechnik (IST), Braunschweig, GERMANY
Doering, Lutz; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | IMEKO XVIII World Congress and IV Brazilian Congress of Metrology:(2006) |
| Availability | [CD-ROM] ; file name: 00426.pdf |
| Verlag | Rio de Janeiro: Letra Capital Ed. |
| Konferenzangaben | IMEKO XVIII World Congress 2006, Rio de Janeiro, 17-22, September, 2006, Brazil |
| Freie Schlagworte | Diamond-like carbon (DLC) ; piezoresistive gauge factor ; micromachined boss membrane sensor |
| Zusammenfassung | Hydrogenated (a-C:H) and hydrogen-free (a-C) amorphous diamond-like carbon (DLC) strain gauges have been successfully integrated on micromachined silicon boss-membrane force sensors. DLC strain gauges were investigated under vertical and horizontal connection as well as longitudinal and transversal orientation at temperatures between RT and 60°C revealing piezoresistive gauge factors typically in the range of 50-90 (a-C:H) and 20-30 (a-C). |
