| Zugriffsnummer | 19451 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Novel characterisation tool for micro-actuators and other compliant microstructures |
| Autor(in); Institution |
Bütefisch, Sebastian; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Brand, Uwe; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Weimann, Thomas; 2.4, Quantenelektronik, PTB-Braunschweig
Feldmann, M.; TU Braunschweig, Institute for Microtechnology, Braunschweig, GERMANY
Waldschik, A.; TU Braunschweig, Institute for Microtechnology, Braunschweig, GERMANY
Büttgenbach, S.; TU Braunschweig, Institute for Microtechnology, Braunschweig, GERMANY
|
| Quelle/Jahr | Actuator 2006 : 10th International Conference on New Actuators & 4th International Exhibition on Smart Actuators and Drive Systems:(2006), 740 - 743 |
| Herausgeber(in) |
Borgmann, Hubert
|
| ISBN | 3-933339-08-1 |
| Verlag | Bremen: HVG Hanseatische Veranstaltungs-GmbH, Division Messe Bremen |
| Konferenzangaben | Actuator 2006, Bremen, 14-16, June 2006, Germany |
| Freie Schlagworte | force measurement ; 3D ; actuators ; electromagnetic ; reluctance |
| Zusammenfassung | Based on a set-up developed at PTB earlier a novel characterisation tool for high accuracy, three-dimensional force and displacement measurements was realised and tested. The main task of the tool is the characterisation of micro actuators and other compliant micro-structures. For the displacement measurement a multi axial laserinterferometer was used to provide the high accuracy needed in this application. To measure the exerted forces of an actuator or reaction forces of compliant structures three standard bending beam force sensors based on strain-gage technology with a high performance signal conditioning system were used. A technique to attach and adjust the movable part of electromagnetic actuators to the force measurement unit enabling a free travel versus its counterpart is described and first results are presented. To increase the sensitivity of the set-up in a further development stage a micro machined three axial force sensor developed earlier will be used. A novel assembly strategy for the sensing element is presented and the advantages against former approaches are described. |
