| Zugriffsnummer | 19337 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | ESAD - a highly accurate deflectometric flatness standard |
| Autor(in); Institution |
Geckeler, Ralf D.; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
|
| Quelle/Jahr | DGaO-Proceedings: 107 (2006), B26 |
| Availability | [Online only] |
| ISSN | 1614-8436 |
| URL | |
| Verlag | Erlangen: Deutsche Gesellschaft für angewandte Optik |
| Konferenzangaben | 107. Jahrestagung der DGaO (Deutsche Gesellschaft für angewandte Optik eV.), Weingarten, 06-10, Juni, 2006, Deutschland |
| Zusammenfassung | We built a scanning facility for the highly accurate and traceable measurement of large near-flat and slightly curved optical surfaces based on ESAD (Extended Shear Angle Difference) shearing deflectometry. Sub-nm repeatability, reproducibility, and uncertainty of topography measurement have been achieved. ESAD utilizes the propagation of light as a natural straightness standard and traceable measurands to create a flatness standard with highest accuracy to replace the three-flat test or liquid mirrors as starting points of the traceability chain in flatness measurement. |
