| Zugriffsnummer | 19271 |
| Dokumenttyp | Konferenzartikel |
| Sprache | Englisch |
| Titel | Tactile probing of micro-features - recent advances in the development of the tactile-optical microprobe |
| Autor(in); Institution |
Schwenke, Heinrich; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Neuschaefer-Rube, Ulrich; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
Wissmann, Mark; 5.3, Koordinatenmesstechnik, PTB-Braunschweig
|
| Quelle/Jahr | Coordinate measuring technique : VIIth international scientific conference = Wspolrzednosciowa technika pomiarowa:(2006), 275 - 280 |
| Schriftenreihe | Zeszyty naukowe / Akademia Techniczno-Humanistyczna w Bielsku-Bialej : Budowa i eksploatacja maszyn: 22 : Konferencje: 7 |
| Verlag | Bielsko-Biala: Wydawn. ATH |
| Konferenzangaben | 7th Conference on Coordinate Metrology, Bielsko-Biala, 03-05, April, 2006, Poland |
| Freie Schlagworte | Microprobe ; micro ; measurement |
| Zusammenfassung | The tactile-optical microprobe has conquered many applications in the measurement of micro parts and features. Typical applications are the measurement of spray holes in injection nozzles or micromechanical components for hard disks and consumer products. Worldwide, there are over 120 installations in daily use. Although the system can deliver accuracies in the sub-micron range, it is subject to certain limitations in comparison with conventional probes for the macro world: The sensitivity is limited to 2D and the scanning capabilities are restricted. Also the measurement of structures with a very high aspect ratio can be limited. Recent research in PTB has been directed towards overcoming these limitations. The paper presents the progress of the work and introduces new concepts, how the functionality and accuracy can be further enhanced. First results are presented. |
