| Zugriffsnummer | 19021 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Traceable multiple sensor system for measuring curved surface profiles with high accuracy and high lateral resolution |
| Autor(in); Institution |
Schulz, Michael; 4.2, Bild- und Wellenoptik, PTB-Braunschweig
Elster, Clemens; 8.4, Mathematische Modellierung und Datenanalyse, PTB-Berlin
|
| Quelle/Jahr | Optical Engineering: 45 (2006), 6, 060503-1 - 060503-3 |
| ISSN | 0091-3286 |
| DOI | |
| Verlag | Bellingham, Wash.: SPIE |
| Klassifikationscode | PACS: 07.60.Ly ; PACS: 42.79.Pw ; PACS: 06.20.Dk |
| Freie Schlagworte | scanning ; sensors ; metrology ; aspherics ; profiles |
| Zusammenfassung | A new scanning system is presented for the high-accuracy form measurement of flat and slightly curved surface profiles. The system employs a small measuring head with multiple distance sensors which is scanned along the surface. Additionally, an autocollimator is utilized to account for angular scanning stage errors. For this set-up, suitable design of experiment allows canning stage errors as well as systematic distance sensor offset errors to be eliminated. As a consequence, high-accuracy form measurements of flat and slightly curved surfaces with high resolution can be achieved. A demonstrator set-up has been realized and tested. The results confirm the high potential of this method. |
