| Zugriffsnummer | 18980 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | Nanoscale surface measurements at the side walls of nano and micro structures |
| Autor(in); Institution |
Dai, Gaoliang; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Wolff, Helmut; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Weimann, Thomas; 2.4, Quantenelektronik, PTB-Braunschweig
Xu, Min; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Pohlenz, Frank; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Nanoscale metrology. Measurement Science and Technology: 18 (2007), 334 - 341 |
| ISSN | 0957-0233 |
| DOI | |
| Verlag | Bristol: IOP |
| Konferenzangaben | 7th Seminar on Quantitative Microscopy (QM) and 3rd Seminar on Nanoscale Calibration Standards and Methods: Dimensional and related measurements in the micro- and nanometre range, Wabern bei Bern, 24-25, April, 2006, Switzerland |
| Freie Schlagworte | Sidewalls ; nano and micro structures ; line edge roughness ; probe ; micro assembling ; atomic force microscopy ; micro coordinate measuring machine |
| Zusammenfassung | A method for direct and non-destructive sidewall scanning of nano and micro structures is presented. The measurements are performed with a kind of novel "assembled cantilever probes (ACPs)". Such ACPs consist of four parts: substrate, cantilever, extension(s), and probe tip(s). The tip(s) located at the free end of the extension may extend horizontally. As the benefit, the ACPs are capable of probing in a direction perpendicular to sidewalls. The bending, torsion or deformation of the cantilever is detected when the tip is brought into contact, intermittent contact or non-contact, with sidewalls. Investigations show that the ACPs have a low measurement noise at subnanometre level. Measurement examples performed at the sidewalls of microtrenches, microgears and line edge roughness samples are given in this paper. |
