| Zugriffsnummer | 18977 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Accurate and traceable measurement of nano- and microstructures |
| Autor(in); Institution |
Dai, Gaoliang; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Pohlenz, Frank; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Xu, Min; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Koenders, Ludger; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Danzebrink, Hans-Ulrich; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Wilkening, Günter; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Measurement Science and Technology: 17 (2006), 3, 545 - 552 |
| ISSN | 0957-0233 (PRINT) ; 1361-6501 (ONLINE) |
| DOI | |
| URL | |
| Verlag | Bristol: IOP |
| Freie Schlagworte | SPM ; AFM ; profilometer ; calibration ; traceability ; nanostructure ; microstructure ; step height ; microgroove ; pitch ; grating ; roughness ; indentation |
| Zusammenfassung | An approach to establishing rigorous nano- and microdimensional metrology using scanning probe microscopes (SPMs) and metrological profilometers is presented. An overview on calibrations of nanostructures - such as step height, one- and two-dimensional gratings, feature width, nanoroughness and geometry of a nanohardness indenter - and microstructures - such as microgroove, microroughness and geometry of a macrohardness indenter - is given in this paper. |
