| Zugriffsnummer | 18779 |
| Dokumenttyp | Konferenzartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Calibration of low-force stylus probes |
| Autor(in); Institution |
Doering, Lutz; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Peiner, Erwin; TU Braunschweig, Institute for Semiconductor Technology, Braunschweig, GERMANY
Balke, Michael; TU Braunschweig, Institute for Semiconductor Technology, Braunschweig, GERMANY
Brand, Uwe; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | IMEKO XVIII World Congress and IV Brazilian Congress of Metrology:(2006) |
| Availability | [CD-ROM] ; file name: 00427.pdf |
| Verlag | Rio de Janeiro: Letra Capital Ed. |
| Konferenzangaben | IMEKO XVIII World Congress 2006, Rio de Janeiro, 17-22, September, 2006, Brazil |
| Freie Schlagworte | micro force ; transfer standard ; stiffness |
| Zusammenfassung | Traceable measurement of forces involved during stylus profiling is described. For this purpose two methods based on a transferable cantilever-type force standard were developed using (1) the cantilever deflection and (2) the offset of an integrated piezoresistive strain gauge. Force calibration was performed with commercial stylus instruments in the range of 10 - 200 μN. |
