| Zugriffsnummer | 18583 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Englisch |
| Titel | Modified fabrication of planar sub-µm superconductor-normal metal-superconductor Josephson junctions for use in a Josephson arbitrary waveform synthesizer |
| Autor(in); Institution |
Hagedorn, Daniel; 2.4, Quantenelektronik, PTB-Braunschweig
Kieler, Oliver; 2.4, Quantenelektronik, PTB-Braunschweig
Dolata, Ralf; 2.4, Quantenelektronik, PTB-Braunschweig
Behr, Ralf; 2.6, Elektrische Einheiten, PTB-Braunschweig
Müller, Franz; 2.4, Quantenelektronik, PTB-Braunschweig
Kohlmann, Johannes; 2.4, Quantenelektronik, PTB-Braunschweig
Niemeyer, Jürgen; 2.4, Quantenelektronik, PTB-Braunschweig
|
| Quelle/Jahr | Superconductor Science and Technology: 19 (2006), 4, 294 - 298 |
| ISSN | 0953-2048 |
| DOI | |
| URL | |
| Verlag | Bristol: IOPP |
| Freie Schlagworte | SNS Josephson junction series arrays ; Josephson arbitrary waveform synthesizer |
| Zusammenfassung | A flexible and reliable fabrication technology has been established at PTB for the development of circuits based on superconductor-normal metal-superconductor (SNS) Josephson junctions. Submicrometre junctions are necessary in order to handle the large critical current densities of SNS junctions. In the development of both a new production method and new applications, many changes to the design or fabrication process are inevitable. Electron-beam lithography is suitable for structures down to below 100 nm and offers a high reproducibility. Combining electron-beam lithography with chemical-mechanical polishing (CMP) delivers a powerful tool for both the development of applications and the actual production of experimental circuits. In this paper we describe the design and fabrication of SNS arrays embedded in superconducting high-frequency lines for application in a Josephson arbitrary waveform synthesizer (JAWS), and first measurements are presented. We successfully fabricated junctions from 0.04 to 4 µm2 in series arrays of up to 512 junctions. Correct function is shown in a frequency range from 5 to 20 GHz. |
Zitierung
Hagedorn, D., Kieler, O., Dolata, R., Behr, R., Müller, F., Kohlmann, J., & Niemeyer, J. (2006). Modified fabrication of planar sub-µm superconductor-normal metal-superconductor Josephson junctions for use in a Josephson arbitrary waveform synthesizer. Superconductor Science and Technology, 19(4), 294–298. https://doi.org/10.1088/0953-2048/19/4/009