| Zugriffsnummer | 18441 |
| Dokumenttyp | Zeitschriftenartikel |
| Peer Review | unbekannt |
| Sprache | Englisch |
| Titel | Absolute measurement of F2-laser power at 157 nm |
| Autor(in); Institution |
Kück, Stefan; 4.1, Photometrie und angewandte Radiometrie, PTB-Braunschweig
Brandt, Friedhelm; 4.1, Photometrie und angewandte Radiometrie, PTB-Braunschweig
Kremling, Hans-Albert; 4.1, Photometrie und angewandte Radiometrie, PTB-Braunschweig
Gottwald, Alexander; 7.1, Photonenradiometrie, PTB-Berlin
Hoehl, Arne; 7.1, Photonenradiometrie, PTB-Berlin
Richter, Mathias; 7.1, Photonenradiometrie, PTB-Berlin
|
| Quelle/Jahr | Applied Optics: 45 (2006), 14, 3325 - 3330 |
| ISSN | 0003-6935 (PRINT) ; 1539-4522 (ONLINE) |
| DOI | |
| Verlag | Washington, DC: OSA |
| Klassifikationscode | OCIS: 120.3940 ; OCIS: 120.4800 ; OCIS: 120.5630 ; OCIS: 140.2180 |
| Freie Schlagworte | Metrology ; Optical standards and testing ; Radiometry ; Laser radiometry ; Excimer lasers ; F2 laser ; 157 nm |
| Zusammenfassung | We report on the comparison between different realizations of laser power measurements at the F2 laser wavelength of 157 nm within the Physikalisch-Technische Bundesanstalt (PTB), the German National Metrology Institute. At the PTB laboratory at the electron storage ring BESSY II in Berlin the scale for laser power is directly traced to a cryogenic radiometer operating at 157 nm, whereas at the PTB laser radiometry facility in Braunschweig the calibration of transfer detectors is performed with a newly developed standard for laser power at 157 nm, which is traceable to a cryogenic radiometer operating at 633 nm via several steps. The comparison was performed under vacuum conditions with laser pulse energies of ≈ 10 μJ, however with different average powers due to the different primary standard radiometers used. The relative deviation for the responsivity of the transfer detector is 4.8 % and thus within the combined standard uncertainty. |
