| Zugriffsnummer | 18367 |
| Dokumenttyp | Konferenzartikel in Zeitschrift |
| Sprache | Englisch |
| Titel | Laboratory LPP EUV reflectometer working with non-polarized radiation |
| Autor(in); Institution |
Loyen van, Ludwig; IWS Dresden, Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, GERMANY
Böttger, Thomas; IWS Dresden, Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, GERMANY
Schädlich, Stefan; IWS Dresden, Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, GERMANY
Braun, Stefan; IWS Dresden, Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, GERMANY
Foltyn, Thomas; IWS Dresden, Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, GERMANY
Leson, Andreas; IWS Dresden, Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden, GERMANY
Scholze, Frank; 7.1, Photonenradiometrie, PTB-Berlin
Müllender, Stephan; Carl Zeiss SMT AG, Oberkochen, GERMANY
|
| Quelle/Jahr | 13th Applied Surface Analysis Workshop. Applied Surface Science: 252 (2005), 1, 57 - 60 |
| ISSN | 0169-4332 |
| DOI | |
| Verlag | Amsterdam: Elsevier |
| Konferenzangaben | 13th Applied Surface Analysis Workshop (AOFA 13), Dresden, 14-17, September, 2004, Germany |
| Klassifikationscode | PACS: 06.20.-f ; PACS: 42.82.C ; PACS: 07.60.Hv |
| Zusammenfassung | A laboratory extreme ultraviolet reflectometer (EUVR) for the wavelength range from 10 to 16 mm was built at IWS Dresden using a gold target pulse plasma (Au-LPP) source. The peak reflectance and the center wavelength are reproduced in relative standard deviation of 0.2 and 0.02 %, respectively. In contrast to measurements line-arly polarized s-adjusted synchrotron radiation at PTB, measurements with non-polarized radiation at the EUVR yield systematically lower values for the reflectance due to the smaller reflectance of the p-component at higher angles of incidence. |
Zitierung
Loyen van, L., Böttger, T., Schädlich, S., Braun, S., Foltyn, T., Leson, A., Scholze, F., & Müllender, S. (2005). Laboratory LPP EUV reflectometer working with non-polarized radiation. Applied Surface Science, 252(1), 57–60. https://doi.org/10.1016/j.apsusc.2005.01.113