| Zugriffsnummer | 18320 |
| Dokumenttyp | Zeitschriftenartikel |
| Sprache | Deutsch |
| Titel | Ein Differential-Interferometer mit konfokalem Positionssensor zum Messen kleinster Verschiebungen eines stark gekrümmten Prüflings |
| Übersetzungstitel | A differential interferometer with confocal position sensor for the measurement of very small displacements of an object with narrow curvature |
| Autor(in); Institution |
Li, Zhi; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Herrmann, Konrad; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Pohlenz, Frank; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
Popadic, Radovan; 5.1, Nano- und Mikrometrologie, PTB-Braunschweig
|
| Quelle/Jahr | Technisches Messen: 72 (2005), 10, 549 - 555 |
| ISSN | 0171-8096 |
| Verlag | München: Oldenbourg Wissenschaftsverlag |
| Freie Schlagworte | Nanometrologie ; Interferometrie ; Verschiebungsmessung ; Nanoindentation-Gerät |
| Zusammenfassung | This paper describes the development of a differential interferometer with new configuration for displacement measurements on strongly curved objects. A confocal position sensor was introduced into the setup of an existing diferential interferometer with the aim to determine the relative position between the object and the reference beamsplitter. An experimental prototype has been built to calibrate the depth measuring system in a commercial nanoindentation instrument, which also clearly demonstrates the advantages of the differential interferometer developed. |
